The furnace body is designed in strict accordance with the international vacuum standards. The opening, closing, and locking of the furnace door are simple, flexible, safe, and reliable. The furnace shell is round and has a double-layer water-cooled jacket structure (the outer cylinder is made of high-quality carbon steel, and the inner barrel is made of 304 stainless steel), and the pipe is made of stainless steel or high-quality carbon steel. The system has undergone strict air pressure and vacuum tests before leaving the factory to ensure that the equipment maintains a pressure rise rate of better than 1Pa/h during long-term use.

All structural parts in the vacuum chamber use metal elements and insulating ceramics and undergo strict ultra-high vacuum polishing, degreasing, and degassing treatments to ensure a clean vacuum environment. It adopts standard configuration PLC, vacuum data recorder, etc., to realize the intelligence, manual and automation of the equipment, and to complete the corresponding experiment and production requirements in strict accordance with the established process to achieve data rigor and objectivity.

The equipment abandons the combination of diffusion pump and mechanical pump of the traditional vacuum furnace and adopts the combination of molecular pump and mechanical pump, which is clean and oil-free and will not return oil from the diffusion pump, ensuring the cleanliness of the vacuum chamber and the processing materials. There is no need for the preheating link of the diffusion pump, the start-up time is fast, the vacuum acquisition time is short, and the production efficiency is greatly improved.